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Magazine Name : International Journal Of Surface Science And Engineering

Year : 2009 Volume number : 03 Issue: 03

Evaluation Of Gear Engagement Accuracy By Transmission Error With Sub-Microradian Resolution (Article)
Subject: Measurement , Gear Engagement , Te , Transmission Error
Author: Syuhei Kurokawa      Yasutsune Ariura     
page:      160 - 177
Study On Residual Resist Layer Thickness Measurement For Nanoimprint Lithography Based On Near-Field Optics (Article)
Subject: Nil , Nanoimprint Lithography , Residual Resist , Rlt
Author: Satoru Takahashi      Shuichi Minamiguchi     
page:      178 - 194
Scanning In Situ Self-Calibration Method Of The Two-Probe Method Of Straightness Measurement (Article)
Subject: Self-Calibration , Two-Probe Method , Software Datum , In Situ
Author: Yoshikazu Arai      Jung Chul Lee     
page:      195 - 207
Fundamental Study On The Position Detection Signal Analysis For The Fibre Optical Trapping Probe (Article)
Subject: Laser Trapping , Fibre Optical Trapping , Nano-Cmm , Probing Technique
Author: S.I. Eom      T Hayashi     
page:      208 - 226
Improvement Of A Fast Tool Control Unit For Cutting Force Measurement In Diamond Turning Of Micro-Lens Array (Article)
Subject: Fast Tool Control Unit , Piezoelectric Force Sensor , In-Process Measurement , Diamond Turning Machine
Author: Young Jin Noh      Yoshikazu Arai     
page:      227 - 241
Proposal Of Concurrent Measurement Method For Spindle Radial, Axial And Angular Motions Using Concentric Grating Interferometers (Article)
Subject: Spindle , Radial Motion , Axial Motion , Angular Motion
Author: Muhummad Madden      Masato Aketagawa     
page:      242 - 252
Precision Positioning Cotrol Of A Sawyer Motor-Based Two-Axis Planar Motion Stage (Article)
Subject: Sawyer Motor , Motion Control , Precision Positioning , Smo
Author: Songyi Dian      Yoshikazu Arai      Wei Gao     
page:      253 - 271